SEMICONDUCTOR
SEMICONDUCTOROn-Site Hydrogen for Semiconductor Fabrication
Semiconductor fabs require continuous supplies of ultra-pure hydrogen for thermal annealing, chemical vapor deposition, and reducing atmospheres. On-site electrolysis with IONZERA membranes eliminates cylinder dependency.
Membrane Cross-Section
PSU-TiO₂-GOEliminate Cylinder Logistics
On-site generation replaces the complex logistics of compressed hydrogen cylinder delivery, storage, and changeover in cleanroom-adjacent areas.
Consistent Supply Reliability
Alkaline electrolysers with IONZERA membranes provide continuous, demand-responsive hydrogen generation, ensuring fab operations never face supply interruptions.
Lower Operating Cost
IONZERA's 3x lower area resistance reduces the electricity cost of on-site H2 generation versus both delivered cylinders and less efficient electrolyser alternatives.
Compact Installation
IONZERA's thin 350-410 um profile enables compact electrolyser stacks that fit within the space constraints of semiconductor facility utility areas.
Hydrogen in Semiconductor Manufacturing
The semiconductor industry uses hydrogen in multiple critical process steps. Forming gas (H2/N2 mixtures) is used in thermal annealing to passivate silicon-silicon dioxide interfaces. Pure hydrogen serves as a carrier gas in chemical vapor deposition (CVD) and epitaxial growth processes. Reducing atmospheres containing hydrogen prevent oxidation during high-temperature processing steps.
While individual fab hydrogen consumption is modest compared to industrial-scale applications, the requirements for purity, reliability, and continuous availability are exceptionally stringent. On-site electrolysis using IONZERA membranes addresses all of these requirements while eliminating the logistical complexity of delivered gas.
Advantages of On-Site Electrolytic H2
Compared to cylinder or tube trailer delivery, on-site electrolysis offers several advantages for semiconductor fabs:
Nanocomposite Structure
PSU-TiO₂-GOLower Resistance
Thinner Profile
Integration with Fab Utility Systems
G-Hexa works with semiconductor facility equipment suppliers to provide IONZERA membranes optimized for the compact, reliable electrolysers that fab utility systems demand. Our engineering team can support sizing calculations based on your fab's hydrogen consumption profile and purity requirements, including post-electrolysis purification specifications.
Area Resistance
3x LOWERThickness
20% THINNERReady to Evaluate IONZERA?
Request a sample to test IONZERA in your application. Our engineering team will support you through qualification and integration.
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